Select a KOFLOC gas mass flow meter or mass flow controller around the gas, working flow range and function required. Whether you are monitoring a gas supply or maintaining a controlled flow, the instrument must suit the operating conditions and equipment interface.
KOFLOC offers instruments for applications including analytical equipment, semiconductor processes, fuel-cell testing and industrial gas systems. Model selection determines the available flow range, accuracy, display, electrical signals and wetted materials.
Mass flow meter or mass flow controller?
| Instrument | Function | When to select it |
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| Mass flow meter — MFM |
Measures gas flow and provides an indication or output signal. |
When flow is regulated elsewhere and you need to monitor or record it. |
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| Mass flow controller — MFC |
Measures flow and adjusts an integral control valve to follow a setpoint. |
When the instrument must automatically maintain the required gas flow. |
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An optional manual needle valve on a meter does not provide the same automatic regulation as a mass flow controller.
Compare KOFLOC model options
| Series | Instrument type | Main selection point |
|---|
| 3760 |
Standard mass flow meter |
Gas measurement for integration into an external indication or monitoring system. |
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| 3810DSII |
Mass flow meter with display |
Local instantaneous and totalised flow indication, with signal options. |
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| 8700 |
Digital mass flow controller or meter with display |
Local operation, RS485 communication and analogue signal options. Select the meter or controller version explicitly. |
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| 5100 |
Metal-sealed mass flow controller |
Automatic flow control where metal-sealed construction is required. |
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| 5410 |
Metal-sealed mass flow meter |
Measurement where metal-sealed construction is required. |
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| EX-250S |
Compact digital mass flow controller or meter |
Compact equipment integration with digital functions. |
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| EX-550 |
All-metal digital mass flow controller or meter |
Digital measurement or control with metal-sealed construction. |
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Confirm the gas, full-scale range, pressure conditions, fittings and electrical interface for the selected configuration. Features are not interchangeable across every series.
Flow range and accuracy comparison
| Series | Full-scale range options | Published accuracy |
|---|
| 3760 |
10 SCCM to 100 SLM, on an N₂-equivalent basis |
±1 to ±1.5% of full scale, depending on specification |
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| 3810DSII |
10 SCCM to 100 SLM across the series; confirm the selected gas and range |
±2 to ±3% of full scale, depending on specification |
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| 8700 |
10 SCCM to 100 SLM, on an N₂-equivalent basis |
±1 to ±1.5% of full scale, depending on specification |
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Understanding the range: These figures describe the available full-scale options across each series. They do not mean that one instrument measures the entire span from 10 SCCM to 100 SLM.
Understanding accuracy: Percentage of full scale is different from percentage of reading. For example, ±1% of a 100 SCCM full-scale range is ±1 SCCM under the specified conditions.
Display and equipment connection
The 3810DSII provides instantaneous and totalised flow indication, alarm settings and a totalising pulse output. Analogue signal options include 1–5 V DC or 4–20 mA. An optional needle valve allows manual adjustment.
The 8700 series provides instantaneous and totalised flow indication, alarm settings and RS485 communication. Its analogue interface supports 0–5 V DC, switchable to 4–20 mA as specified by the manufacturer.
For an equipment upgrade, provide the existing wiring diagram or connector details. Confirm the supply voltage, signal scaling and communication requirements before replacing an instrument.
8500 and D8500 replacement
KOFLOC discontinued the 8500 and D8500 series in December 2021 and identified the 8700 series as the alternative.
| Existing instrument | Replacement route | Checks required |
|---|
| 8500 / D8500 mass flow meter |
8700 series meter configuration |
Gas, calibrated range, fittings, dimensions, power supply and output signals. |
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| 8500 / D8500 mass flow controller |
8700 series controller configuration |
All meter checks, plus control range, inlet/outlet pressures and setpoint interface. |
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| Other older model references |
Individual model review |
Provide the complete model code and nameplate photograph. A similar series number does not establish compatibility. |
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The 8700 is a replacement selection route, not a guarantee of identical wiring, dimensions or configuration.
Existing specification references
The original specification images are retained below to help identify installed instruments. For new orders, use the confirmed specification for the quoted model.
D3810 specification reference
Original D3810 reference. Do not apply these specifications to the 3810DSII without checking the selected model.
3760 and 3765 specification reference
Original 3760/3765 specification reference. Confirm the specification and connections for the selected instrument.
Discontinued 8500 specification reference
Historical 8500 specifications for existing users. Refer to the 8700 series for replacement selection.
Gas calibration and flow units
Specify the actual gas or mixture. Thermal mass flow instruments depend on the gas properties, so changing from nitrogen to another gas may require an approved conversion or a different calibration.
SCCM and SLM express flow at defined reference conditions. State the reference temperature and pressure when comparing instruments or specifying a replacement.
Request a model selection and quotation
Contact us for pricing and availability. Include the gas composition, minimum and maximum flow, inlet and outlet pressures, temperature, connection size, power supply and required signals.
Specify whether you need measurement only or automatic flow control. For an existing instrument, include its complete model code and a clear photograph of the nameplate.
